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Air Products launches purest arsine grade
21st April 2004 — Air Products announced today
at Semicon Europa, Munich, Germany, that it is introducing
Megabit III™ Arsine to the European market.
The introduction of Megabit III™ Arsine, the highest
grade of arsine on the market, demonstrates a continued
effort to provide solutions that meet the changing demands
of the compound semiconductor market. High purity arsine
is essential to grow epitaxial films with low background
doping concentration via the MOCVD process.
Typical customer requirements are dopant concentrations
of 5x1014 /cm³. Air Products' Electronics team has
developed Megabit III, with background doping concentration
in GaAs of <1014 /cm³.
"Until recently, background doping levels of 1015/cm³
were considered acceptable in most applications. Most currently
available high-purity grades of arsine can satisfy this
requirement. However, process changes and demand for more
sophisticated devices have resulted in the need to lower
background doping levels," explains Dr Rajiv Agarwal,
lead research engineer, Air Products.
Results for Megabit III grade arsine for Epitaxial GaAs
from MOCVD Process
Process Conditions:
| Film thickness: |
10µ |
| Growth Temperature: |
650 °C |
| V/III: |
150 |
| Cylinder number |
Hall Mobility(cm²/V.s) |
Dopant Concentration(/cm³) |
| SD010760 |
187,000 |
2.0x1013 |
| SD0012546 |
197,000 |
1.8x1013 |
| SD011382 |
186,000 |
7.0x1013 |
| SG9927720B |
181,000 |
5.4x1013 |
| SD0012381 |
167,000 |
3.5x1013 |
About Air Products:
Air Products (NYSE:APD) serves customers in technology,
energy, healthcare and industrial markets worldwide with
a unique portfolio of products, services and solutions,
providing atmospheric gases, process and specialty gases,
performance materials and chemical intermediates. Founded
in 1940, Air Products has built leading positions in key
growth markets such as semiconductor materials, refinery
hydrogen, home healthcare services, natural gas liquefaction,
and advanced coatings and adhesives. The company is recognized
for its innovative culture, operational excellence and commitment
to safety and the environment. With annual revenues of $6.3
billion and operations in over 30 countries, the company's
18,500 employees build lasting relationships with their
customers and communities based on understanding, integrity
and passion. For more information, visit www.airproducts.com.
Further information:
Guenaelle Holloway, Air Products corporate communications
Tel: +44 (0)1932 249 245, email: contact
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